The filtration system in a semiconductor clean room is a key piece of equipment for keeping the internal environment clean and dust-free. In order to ensure the effective operation of the filtration system and extend its service life, we need to take a series of maintenance and maintenance measures.
Regular cleaning of the filter: The filter in the semiconductor clean room is the core component to ensure air cleanliness, so the filter should be cleaned or replaced regularly to prevent dust and particles from clogging the filter material and affecting its filtration effect. When cleaning the filter, special cleaners and tools should be used to avoid damaging the filter material.
The operating condition of the exhaust system directly affects the air quality of the cleanroom. The exhaust system should be checked regularly to ensure its normal operation and smooth ventilation. Inspection includes fan, air duct, exhaust port and other components, if found damaged or malfunctioning, it should be repaired or replaced in time.
By installing air quality monitoring equipment, the air quality of the semiconductor cleanroom can be monitored in real time, so that air quality problems can be detected in a timely manner and corresponding measures can be taken. For example, when the concentration of particles in the air exceeds the set value, the backup filter can be activated or the number of cleaning times can be increased to reduce the concentration of particles.
Consumables and accessories in semiconductor clean rooms, such as surgical caps and gloves, should be replaced periodically to ensure their cleanliness and sterilization. When replacing consumables and accessories, care should be taken to select products that meet the requirements and follow the prescribed operating procedures.
Operators of semiconductor cleanrooms should receive systematic training to understand the principle, operation and maintenance methods of the filtration system, and to improve operation skills and safety awareness. Through training, operators can better understand the operating conditions of the filtration system, timely detection and resolution of problems.
According to the actual situation of the semiconductor clean room, develop a detailed maintenance plan for the filtration system, including cleaning cycle, inspection cycle, replacement cycle, etc. Maintenance in accordance with the plan can ensure the long-term stable operation of the filtration system and filtration effect.
Establish filtration system maintenance records and maintenance logs to record the time, content, personnel and other information of each maintenance. By analyzing the maintenance records and logs, you can understand the operation status of the filtration system and the existing problems, and find and solve them in time.
Contact Person: Mrs. Zhao
Tel: 86 20 13378693703
Fax: 86-20-31213735